EcoSystem Monitoring of Pilot Lines

LightMe will provide validated processes and tools for on-line quality monitoring and control. In particular, quality control and process verification systems will be coupled with innovative automated tools to increase the process control and ensure the required productivity as well as monitoring the quality of materials and products. Process monitoring, and control will be upgraded in all the Pilot Lines, using user-friendly control systems, assuring the remotely monitored control and the continuous and safe operation of the processes.

Process Monitoring

  • • Scanning electron microscopy
  • • Atomic force microscopy
  • • White light Interferometry
  • • Scatterometry
  • • Diffractometry
  • • Confocal microscopy

Process Control

  • • Machine learning